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VAT Vakuumventile AGReturn to List
CC-Link｜Device｜Miscellaneous
0x4D (vaccum valve) / Series 612 Butterfly control valve
Butterfly control valve, APC (automatic pressure control), Vacuum butterfly control valve system, CC-Link interface, pressure control /
Area of Application: SEMI, FDP, SOLAR, PV (Etch, CVD)
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