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  5. Ionization Vacuum Gauge M-722HG-CC, M-822HG-CC, M-832HG-CC, M-922HG-CC

製品情報

CC-Link partner product information

CC-Link|Slave|Process Device

CANON ANELVA CORPORATION

Ionization Vacuum Gauge M-722HG-CC, M-822HG-CC, M-832HG-CC, M-922HG-CC

The B-A type ionization vacuum gauge series is controllable by the CC-Link.

Feature

  • A large-size liquid crystal display is adopted.
  • The pressure range can be automatically switched.
  • Roughing gauge option
    ・The gauge can not only measure the pressure of a roughing gauge but also transmits pressure data.
    ・The roughing gauge is automatically switched to the B-A gauge (M-822HG-CC and M-832HG-CC only).
  • The B-A type ionization vacuum gauge series can be used for vacuum units for manufacturing semiconductors and electronic devices, and analyzing units, including electron microscopes, and for the measurement and control of the pressure of various vacuum units.
Station type Remote device station
Number of stations occupied 1 station or 2 stations
CC-Link version
External dimensions 99 (H) × 209 (W) × 330 (D) mm
Mass Approx. 5.4 kg
Standard Price

Contact

[Korea]
  • 제조사 캐논아넬바㈜

    대리점 캐논세미콘덕터엔지니어링코리아
    경기도 수원시 영통구 영통동 영일로26길 봉빌딩 5층(1014-15 )
    Tel: 031-677-6182