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  5. 0x4D (vaccum valve) / Series 612 Butterfly control valve

製品情報

CC-Link partner product information

CC-Link|Slave|Miscellaneous

VAT Vakuumventile AG

0x4D (vaccum valve) / Series 612 Butterfly control valve

Butterfly control valve, APC (automatic pressure control), Vacuum butterfly control valve system, CC-Link interface, pressure control /
Area of Application: SEMI, FDP, SOLAR, PV (Etch, CVD)

Feature

  • Very fast and accurate pressure control
  • Automatic learning of system parameters
  • Hold function for plasma ignition
  • Valve position control
  • Input for pressure sensors
  • Power failure option
Station type Remote device
Number of stations occupied 1, 2, 3 or 4 stations
CC-Link version Ver. 2.0
External dimensions 612 DN40:257 x 124 x 90[mm]
612 DN50:267 x 124 x 90[mm]
612 DN63:329 x 130 x 90[mm]
612 DN80:450 x 145 x 90[mm]
612 DN100:371 x 165 x 90[mm]
612 DN160:447 x 225 x 90[mm]
612 DN200:523 x 285 x 90[mm]
Mass 612 DN40:2.6[Kg],612 DN50:3[Kg],612 DN63:4.1[Kg],612 DN80:4.7[Kg],612 DN100:5[Kg],612 DN160:7.2[Kg],612 DN200:8.1[Kg]
Standard Price

Contact

[Japan]
  • VAT JAPAN:
    Yokohama Plaza Building, Kinko-cho Kanagawa-ku, Yokohama 221-0056
    Phone: +81 45 440 03 40
    E-Mail: JP@vatvalve.com
  • [China]
  • VAT CHINA:
    848 Yunqiao Road, Building No. 1, 4th Floor, Pudong New Area, Shanghai 201206
    Phone: +86 21 5032 6658
    E-Mail: CN@vatvalve.com
  • [Korea]
  • VAT KOREA:
    #391 Chilgoe-dong, Pyeongtaek-si, 459-050 Gyeonggi-do, Korea
    Phone: +82 31 662-6856 - Ext.1
    E-Mail: KR@vatvalve.com
  • [Taiwan]
  • VAT TAIWAN:
    8F-6, No. 81, Shui-Li Road, Hsin-Chu City 30059, Taiwan R.O.C.
    Phone: +886 3 516 90 88
    E-Mail: TW@vatvalve.com
  • [Europe]
  • VAT GERMANY:
    Am Hochacker 4, D-85630 Grasbrunn bei München
    Phone: +49 89 46 50 15
    E-Mail: DE@vatvalve.com
  • [US]
  • VAT US:
    500 West Cummings Park, Suites 5450-5650, Woburn, MA 01801, USA
    Phone: +1 781 935 1446
    E-Mail: US@vatvalve.com
  • [Other]
  • VAT SWITZERLAND (Headquarters):
    VAT Vakuumventile AG, CH-9469 Haag
    Phone: +41 81 771 61 61
    E-Mail: CH@vatvalve.com

    VAT BENELUX:
    Zuiderstraat 30, NL-3434 BH Nieuwegein
    Phone: +31 30 6018511
    E-Mail: benelux@vatvalve.com

    VAT GREAT BRITAIN:
    Edmund House, Rugby Road, Leamington Spa, Warwickshire CV32 6EL
    Phone: +44 19 2645 2753
    E-Mail: UK@vatvalve.com

    VAT SINGAPORE:
    Wisdom Industrial Building, 38A Jalan Pemimpin #01-01, Singapore 577179
    Phone: +65 62525121
    E-Mail: SG@vatvalve.com

    VAT FRANCE:
    Z.I. des Godets, C.E. 419, F-91374 Verrières-le-Buisson
    Phone: +33 1 69 20 69 11
    E-Mail: FR@vatvalve.com
  • URL: http://www.vatvalve.com/

    Product details: http://www.vatvalve.com/publicCatalog/catContent.aspx?stepNo=3&pLandCd=US&pPage=index.shtml&guid=%7b9C50A0F0-3E5B-4987-8920-E4F2EA860BAE%7d&reiheTyp=I&reiheGuid=%7b9C50A0F0-3E5B-4987-8920-E4F2EA860BAE%7d