CC-Link | Slave | Process Device
SHIMADZU CORPORATION
EI-CC-03 CC-Link Interface Unit
This interface unit is designed to control and monitor turbo molecular pumps via the CC-Link/
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Features
- The interface unit is compatible with our magnetic bearing type turbo molecular pump TMP-03 series.
- The interface unit is capable of activating and deactivating turbo molecular pumps.
- The interface unit is capable of monitoring the operating status of turbo molecular pumps during acceleration, deceleration, and steady operation.
- Operation status-related parameters, such as the pump speed and the motor current, can be easily obtained by using a CC-Link master unit.
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Specifications
| Station type |
Remote device station |
| Number of stations occupied |
2 stations |
| CC-Link version |
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| External dimensions |
40 (H) × 150 (W) × 100 (D) |
| Weight |
500 g |

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